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Effect of additional dielectric layer and grounded shield on rf characteristics of GaAs microwave monolithic integrated circuit elements in 3D-integrated modules
- Authors: Sheyerman F.I.1, Goleneva N.V.1, Kokolov A.А.1, Babak L.I.1, Cherkashin M.V.1, Panasenko P.V.2, Volosov А.V.2
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Affiliations:
- Tomsk State University of Control Systems and Radioelectronics
- SC «MERI»
- Issue: Vol 70, No 1 (2025)
- Pages: 27-36
- Section: ЭЛЕКТРОНИКА СВЧ
- URL: https://freezetech.ru/0033-8494/article/view/684119
- DOI: https://doi.org/10.31857/S0033849425010043
- EDN: https://elibrary.ru/HJLCEQ
- ID: 684119
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Abstract
The effect of coating GaAs monolithic integrated circuit with a benzocyclobutene dielectric layer and grounded copper shield is investigated. Using electromagnetic simulation up to 40 GHz, changes of RF characteristics of microstrip and coplanar transmission lines, a Marshand balun, and a bandpass filter due to coating are demonstrated. It is shown that from the performance variation viewpoint, the application of lines is preferred in GaAs monolithic integrated circuits used in 3D-integrated modules with such the coating.
About the authors
F. I. Sheyerman
Tomsk State University of Control Systems and Radioelectronics
Author for correspondence.
Email: fish@tusur.ru
Russian Federation, Lenin Avenue, 40, Tomsk, 634050
N. V. Goleneva
Tomsk State University of Control Systems and Radioelectronics
Email: fish@tusur.ru
Russian Federation, Lenin Avenue, 40, Tomsk, 634050
A. А. Kokolov
Tomsk State University of Control Systems and Radioelectronics
Email: fish@tusur.ru
Russian Federation, Lenin Avenue, 40, Tomsk, 634050
L. I. Babak
Tomsk State University of Control Systems and Radioelectronics
Email: fish@tusur.ru
Russian Federation, Lenin Avenue, 40, Tomsk, 634050
M. V. Cherkashin
Tomsk State University of Control Systems and Radioelectronics
Email: fish@tusur.ru
Russian Federation, Lenin Avenue, 40, Tomsk, 634050
P. V. Panasenko
SC «MERI»
Email: fish@tusur.ru
Russian Federation, Akademika Valieva Str., 6/1, Zelenograd, 124460
А. V. Volosov
SC «MERI»
Email: fish@tusur.ru
Russian Federation, Akademika Valieva Str., 6/1, Zelenograd, 124460
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