Author Details
Шаранов, П. Ю.
| Issue | Section | Title | File |
| No 11 (2024) | Articles | Oxidation and Etching of Thin Ruthenium Films in Low Ion Energy Oxygen Plasma |
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
density functional theory
electron microscopy
electronic structure
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Information
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User
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
density functional theory
electron microscopy
electronic structure
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Information