Author Details
Шаранов, П. Ю.
| Issue | Section | Title | File |
| No 11 (2024) | Articles | Oxidation and Etching of Thin Ruthenium Films in Low Ion Energy Oxygen Plasma |
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Keywords
X-ray diffraction
X-ray diffraction analysis
X-ray photoelectron spectroscopy
compact neutron source
density functional theory
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
neutron reflectometry
phase composition
scanning electron microscopy
scanning probe microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
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User
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Keywords
X-ray diffraction
X-ray diffraction analysis
X-ray photoelectron spectroscopy
compact neutron source
density functional theory
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
neutron reflectometry
phase composition
scanning electron microscopy
scanning probe microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Information