Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films
- Авторлар: Popov A.I.1,2, Presnyakov M.Y.3, Domashevskaya E.P.4, Terekhov V.A.4, Semenov-Shefov M.A.1, Afanas’ev V.P.1, Chukanova T.S.1, Zezin D.A.1,2, Yemets V.M.1, Barinov A.D.1,2, Shapetina M.A.5
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Мекемелер:
- National Research University “Moscow Power Engineering Institute”
- Institute of Nanotechnology of Microelectronics RAS
- National Research Center “Kurchatov Institute”
- Voronezh State University
- Moscow State Pedagogical University
- Шығарылым: № 11 (2023)
- Беттер: 24-32
- Бөлім: Articles
- URL: https://freezetech.ru/1028-0960/article/view/664715
- DOI: https://doi.org/10.31857/S1028096023110171
- EDN: https://elibrary.ru/LXCJUQ
- ID: 664715
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