Sizing the EUV Laser-Plasma Source for a Microscope
- Authors: Reunov D.G.1, Malyshev I.V.1, Perekalov A.A.1, Nechay A.N.1, Chkhalo N.I.1
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Affiliations:
- Institute of Physics of Microstructures, Russian Academy of Sciences
- Issue: No 8 (2023)
- Pages: 16-21
- Section: Articles
- URL: https://freezetech.ru/1028-0960/article/view/664517
- DOI: https://doi.org/10.31857/S1028096023070154
- EDN: https://elibrary.ru/TDSKZF
- ID: 664517
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