Study of the Influence of Ion-Beam Etching on the Surface Roughness of Single-Crystal Sapphire
- Authors: Mikhailenko M.S.1, Pestov A.E.1, Zorina M.V.1, Chernyshev A.K.1, Chkhalo N.I.1, Shevchuk I.E.1
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Affiliations:
- Institute for the Physics of Microstructures, RAS
- Issue: No 12 (2023)
- Pages: 25-30
- Section: Articles
- URL: https://freezetech.ru/1028-0960/article/view/664697
- DOI: https://doi.org/10.31857/S1028096023120154
- EDN: https://elibrary.ru/BDOLQV
- ID: 664697
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