Polymethyl Methacrylate with a Molecular Weight of 107 g/mol for X-Ray Lithography
- Authors: Nazmov V.P.1,2, Varand A.V.1, Mikhailenko M.A.2, Goldenberg B.G.1,3, Prosanov I.Y.2, Gerasimov K.B.2
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Affiliations:
- Budker Institute of Nuclear Physics of SB RAS
- Institute of Solid State Chemistry and Mechanochemistry of SB RAS
- Shared-Use Center “SKIF”, Boreskov Institute of Catalysis of SB RAS
- Issue: No 6 (2023)
- Pages: 27-31
- Section: Articles
- URL: https://freezetech.ru/1028-0960/article/view/664547
- DOI: https://doi.org/10.31857/S1028096023060110
- EDN: https://elibrary.ru/DKCOQS
- ID: 664547
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