Estimation of internal charging potential of dielectrics coated with conductive film

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The charging potentials of quartz glass coated with a conductive metallic film was evaluated. Estimations were made based on the measured dependence of the intensity of the cathodoluminescent signal on the energy of the incident electron beam. Calculations have shown that when quartz glass coated with a 14 nm thick Au film is irradiated, the charging potential can reach 1.7 kV at an electron energy of 10 keV and 2.7 kV at 15 keV. An estimation of the electric field generating under the surface of the grounded film has shown that the field strength does not exceed 4 × 107 V/cm.

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作者简介

N. Orlikovskaya

Lomonosov Moscow State University

编辑信件的主要联系方式.
Email: orlikovskayang@gmail.com
俄罗斯联邦, Moscow, 119991

E. Zykova

Lomonosov Moscow State University

Email: orlikovskayang@gmail.com
俄罗斯联邦, Moscow, 119991

A. Tatarintsev

Lomonosov Moscow State University

Email: orlikovskayang@gmail.com
俄罗斯联邦, Moscow, 119991

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2. Fig. 1. Dependence of the intensity of the cathodoluminescence signal ICL of quartz glass (1), glass coated with a gold film (2), and the charging potential VS of quartz (3) on the time of irradiation with electrons with an energy of E0 = 10 (a) and 15 keV (b), and a current density of j0 = 10–5 A/cm2.

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3. Fig. 2. The change in the interaction region in quartz glass calculated using the Casino v2.5 program when the energy of the electron probe changes from 8.4 (A) to 6.7 keV (B) due to charging.

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4. Fig. 3. Calculated dependences of the potential V (1, 2) and the electric field strength Ein (3, 4) in quartz glass on the depth z at E0 = 10 (1, 3) and 15 keV (2, 4).

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